Next-Generation High-Performance Analysis System: FIB-SEM with Integrated ToF-SIMS

The focused ion beam scanning electron microscope (FIB-SEM) is equipped with a state-of-the-art ToF-SIMS system, delivering enhanced resolution for precise results across a wide range of applications:

  • Quality Assurance & Failure Analysis – Detect defects and contamination at the sub-nanometer scale.
  • Materials & Process Development – Characterize surfaces and layered structures in exceptional detail.
  • Cleanliness Testing & Medical Technology – Reliable testing for highly sensitive applications.
  • Life Sciences – High-resolution 3D imaging of biological samples without the need for labeling.

Benefit from high-resolution analytics without relying on external laboratories—enabling faster results and greater flexibility in your planning.

Competent. Fast. Cost-effective

Thanks to our research and development work, we not only have top-level optical and photonics expertise, but also a high-quality, modern infrastructure.

We are also happy to use our expertise and equipment for your

questions. We can also support smaller companies with design, electronics development and functional model construction in our workshops.

Ask for an offer! 

Contactpersons

Prof. Dr. Alwin Kienle am ILM

Prof. Dr. Alwin Kienle

Director Quantitative Imaging & Sensing

Tel: +49 (0)731 / 1429 224
Dr. Michael Haupt am ILM

Dr. Michael Haupt

Director Medical Devices

Tel: +49 (0)731 / 1429 220
Dr. Rainer Wittig am ILM

Dr. Rainer Wittig

Head of Biology Research

Tel: +49 (0)731 / 1429 115
Damien Kelly (PhD) am ILM

Privatdozent Damien Kelly (PhD)

Group Leader Metrology

Tel: +49 (0)731 / 1429 225

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