3D Nanoscale Chemical Analysis with FIB-SEM – Fast & Precise

With the Helios 5 DualBeam, we analyze materials and surfaces at the highest level. The combination of a scanning electron microscope (SEM, German: REM) and a focused ion beam (FIB) enables targeted sample preparation, cross-sectioning, and the visualization of even the finest structural details, including particle and polymer structures.

The integration of a TOFWERK time-of-flight SIMS detector additionally provides chemical composition information based on emitted secondary ions. This results in a three-dimensional representation of both structure and chemistry down to the nanoscale—within a single measurement.

At ILM, this system provides you with a high-performance analytical platform that is unique in Germany, enabling 3D chemical imaging with nanometer-scale depth resolution. Thanks to correlative analysis, you can simultaneously visualize structural, chemical, and functional properties of your materials—from surface morphology and layer thickness to elemental composition. This allows even highly complex material and biological samples to be characterized with exceptional precision.

These insights provide a comprehensive understanding and support well-founded decision-making in materials development, quality control, and biomedical research.

Your added value: precise analyses, tangible results

Quality Assurance & Failure Analysis:
Detect contamination, particles, and defects with sub-nanometer precision – for maximum product safety.
Materials and Process Development:
Optimize materials, coatings, and manufacturing processes through detailed surface and thin-film analysis, including chemical depth profiling, layer characterization, and diffusion studies – ensuring reliable functionality and tailored material properties.
Cleanliness Testing & Medical Technology:
Examine surfaces and components for particles, residues, and contamination – supporting biocompatible materials and hygiene-critical products.
Life Science Applications:
Obtain high-resolution 3D images of biological tissues without labeling – enabling highly detailed molecular-level mapping.
Time and Cost Advantages:
Benefit from direct, high-resolution analysis without the need for external laboratories – enabling flexible planning and rapid results.
Customized Solutions:
Receive tailored analytical approaches for your specific research, medical technology, and industrial challenges – from feasibility studies to complex projects.

FIB-SEM Applications

Rasterelektronenmikroskopische Aufnahme einer dichten Zellstruktur mit faserähnlichen Verbindungen, eingefärbt in Blautönen

Medicine & Life Sciences

3D molecular mapping of tissue samples
Implant surfaces and biomaterials
Analysis of biological surfaces without labeling

[Translate to Englisch:] Wissenschaftler oder Qualitätsmanager in Schutzkleidung hält einen Chip

Industry & Technology

Failure and Defect Analysis
(Semiconductors, optics, coatings)
Process and Materials Development
(Thin-film characterization, diffusion, contamination)
Quality and Cleanliness Control

Rasterelektronenmikroskopische Aufnahme einer regelmäßigen mikrostrukturierten Oberfläche mit scharfen, dreieckigen Formen

Micro- & Nano-Optics

Characterization of Diffractive Optical Elements
Micro- and Nanostructuring Processes

What We Offer – Your Benefits:

Contract Analysis: Precise analytical services for industry and research – fast, reliable, and application-oriented.
Project Partnerships: Collaborations within ZIM, BMBF, and EU-funded projects to drive innovative research and development.
Knowledge Transfer: Seminars, workshops, and methodological training to strengthen your teams effectively.

Benefit from our expertise and receive tailored solutions for your specific challenges. All technical information can be found in our data sheet. Get in touch with us today – we look forward to your inquiry!

Download PDF Data Sheet

Contactpersons

Dr. Michael Haupt

Director Medical Devices

Write an email Tel: +49 (0)731 / 1429 220

Kathrin Stadelmann, M.Sc.

Research Scientist

Write an email Tel: +49 (0)731 / 1429 669